Method of molding, process for producing lens, molding apparatus, process for producing stamper, master production apparatus, stamper production system, and stamper production apparatus

ABSTRACT

Molded articles, such as a lens, are produced by multiple repetitions of a transfer process composed of the transformation step of bringing a transfer member ( 62 ) provided with a transfer configuration area consisting of the same configuration as that of a lens part with aspherical configuration or the configuration opposed to the lens part with aspherical configuration into contact with a photohardening resin to thereby transform the photohardening resin in conformity with the transfer configuration of the transfer member ( 62 ); the hardening step of irradiating at least a transformed area of the transformed photohardening resin with light by the use of a light irradiation unit ( 60 ) to thereby attain hardening; and the departing step of letting the photohardened resin and the transfer member depart from each other.

TECHNICAL FIELD

The present invention relates to a method of molding, a process forproducing a lens, a molding apparatus, a process for producing astamper, a master production apparatus, a stamper production system, anda stamper production apparatus.

BACKGROUND ART

Patent Document 1 discloses a method of manufacturing a micro lens arrayusing a mold having a surface for forming a lens shape. The methodincludes the steps of: forming multiple lens substrates by using themold to harden a first resin into the lens shape on a first substrate;arranging the lens substrates in an array; forming a master having asurface for forming the lens shape by plating the arrayed lenssubstrates; forming a mother by plating the master surface for formingthe lens shape; forming a molding die using the mother; hardening andforming a second resin into the lens shape on a second substrate usingthe molding die; and performing dry etching to remove the second resinand part of the second substrate.

Patent Document 2 discloses a method of manufacturing a fine structureby sequentially transferring a fine pattern on the surface of a motherstamper. The method includes the steps of: (1) fixing the mother stamperat a specified position of a substrate; (2) supplying a resin betweenthe mother stamper and the substrate; (3) pressing the mother stamperagainst the resin in vacuum; (4) hardening the resin; (5) separating themother stamper from the hardened resin; (6) moving the mother stamper orthe resin so as to change a relative position between the mother stamperand the resin; and (7) repeating the steps (2) through (6) for aspecified number of times after the step (6).

[Patent Document 1] JP-A No. 2005-041125

[Patent Document 2] JP-A No. 2003-094445

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

However, the technologies disclosed in Patent Documents 1 and 2 make itdifficult to fabricate a high-precision lens such as an aspherical lens.

It is an object of the present invention to provide a method of moldingand a molding apparatus capable of more highly precisely molding moldedarticles such as a lens than conventional technologies, to provide aprocess for producing a higher precision lens than conventional ones anda process for producing an associated stamper, and to provide a masterproduction apparatus, a stamper production system, and a stamperproduction apparatus.

Means for Solving the Problems

A first aspect of the invention is a method of molding including: atransformation step of making contact between an article to be moldedand a transfer member and transforming the article to be molded to atransfer shape formed on the transfer member, the transfer shape beingformed equally to or reversely to an aspherical lens portion; ahardening step of hardening at least a transformed portion of thearticle to be molded; a separation step of separating the article to bemolded and the transfer member from each other; and a moving step ofmoving the transfer member to another position of the article to bemolded. A transfer step of transferring the transfer shape to an articleto be molded is repeated more than once.

Preferably, the transformation step includes: an injection step ofinjecting the article to be molded into a plurality of holes formed in asubstrate; and a contact step of contacting the transfer member with thearticle to be molded injected into the hole.

Preferably, the injection step and the contact step are alternatelyrepeated more than once.

Preferably, a pitch distance between positions for the transfer memberto contact the article to be molded is changed or the shape of thetransfer member is changed in accordance with shrinkage of the articleto be molded.

Preferably, the transformation step transforms the article to be moldedusing the transfer member that only forms one aspherical lens shape or ashape formed reversely to the aspherical lens shape.

Preferably, an article to be molded made of a light curing material isused. The hardening step hardens the article to be molded by radiatinglight.

Preferably, an article to be molded made of a heat curing material isused. The hardening step hardens the article to be molded by heating.

Preferably, an aspherical lens is molded.

Preferably, a mold used for forming an aspherical lens is molded.

A second aspect of the invention is a process for producing a lensincluding: a molding step of molding a mold having a plurality of shapesformed reversely to the transfer shape by repeating a transfer step morethan once, wherein the transfer step includes: a transformation step ofmaking contact between an article to be molded and a transfer memberhaving a transfer shape formed equally to an aspherical lens portion andtransforming the article to be molded to the transfer shape; a hardeningstep of hardening at least a transformed portion of the article to bemolded; a separation step of separating the article to be molded and thetransfer member from each other; and a moving step of moving thetransfer member to another position of the article to be molded. Theprocess for producing a lens further includes: a lens array formationstep of forming a lens array having a plurality of aspherical lensportions using a mold molded by the molding step; and a dividing step ofdividing the lens array formed by the lens array formation step into aplurality of lenses having at least one aspherical lens portion.

A third aspect of the invention is a molding apparatus including: asupporting portion that supports an article to be molded; a transfermember that is contactably provided for the article to be moldedsupported by the supporting portion and includes a transfer shape formedequally to or reversely to an aspherical lens portion; a movingapparatus that moves at least one of the supporting portion and thetransfer member so as to separate the transfer member from the articleto be molded supported by the supporting portion and relatively move andcontact the transfer member with another position of the article to bemolded; a hardening apparatus that contacts at least the transfer memberof the article to be molded and hardens a portion transformed to thetransfer shape; and a control portion that controls at least the movingapparatus and the hardening apparatus so that the transfer shape istransferred more than once to the article to be molded.

A fourth aspect of the invention is a process for producing a lensincluding: a master production step of producing a master having atleast one transfer plane shaped equally to a lens surface of a lens; astamper production step of producing a stamper having a reversely shapedplane shaped reversely to the transfer plane; and a lens production stepof producing the lens by transferring the reversely shaped plane to alens material. The master production step includes: a transformationstep of making contact between a master material and a transfer memberhaving a transfer shape formed reversely to an aspherical lens portionof the lens and transforming the master material to the transfer shape;a hardening step of hardening at least a transformed portion of themaster material; and a separation step of separating the master materialfrom the transfer member. The transfer step of transferring the transfershape to the master material is repeated more than once so that thetransfer member successively contacts different positions on the mastermaterial at the transformation step.

Preferably, the transformation step uses the transfer member that onlyforms a shape formed reversely to one aspherical lens shape.

Preferably, a master material made of a light curing material is used.The hardening step hardens the master material by radiating light.

Preferably, a master material made of a heat curing material is used.The hardening step hardens the master material by heating.

Preferably, a lens material made of a light curing resin is used. Thelens production step includes a hardening step of hardening a lensmaterial between the two stampers using light radiated from between thetwo stampers that are placed with the reversely shaped planes oppositeto each other and are provided with the reversely shaped planes shapedequally to or differently from each other.

Preferably, a lens material made of a light curing material is used. Thelens production step includes a hardening step of hardening a lensmaterial using light radiated from between the stamper and an opposedmember placed opposite to the reversely shaped plane of the stamperwhile the lens material exists between the stamper and the opposedmember.

Preferably, a molding material such as a heat curing material is used.The molded article production step hardens the heat curing material byheating.

Preferably, the stamper production step includes: a deposit step ofdepositing metal ion on the transfer plane of the master; and aseparation step of separating the master from a stamper formed bydepositing metal ion.

A fifth aspect of the invention is a process for producing a stamperincluding: a master production step of producing a master having atleast one transfer plane shaped equally to a lens surface of a lens; anda stamper production step of producing a stamper having a reverselyshaped plane shaped reversely to the transfer plane. The masterproduction step includes: a transformation step of making contactbetween a master material and a transfer member having a transfer shapeformed reversely to an aspherical lens portion of the lens andtransforming the master material to the transfer shape; a hardening stepof hardening at least a transformed portion of the master material; anda separation step of separating the master material from the transfermember. The transfer step of transferring the transfer shape to themaster material is repeated more than once so that the transfer membersuccessively contacts different positions on the master material at thetransformation step.

A sixth aspect of the invention is a master production apparatusincluding: a supporting portion that supports a master material used forproducing a master having at least one transfer plane formed equally toa lens surface of a lens; a transfer member that is contactably providedfor the master material supported by the supporting portion and includesa transfer shape formed reversely to an aspherical lens portion of thelens; a moving apparatus that moves at least one of the supportingportion and the transfer member so as to contact and separate thetransfer member from the master material supported by the supportingportion; a hardening apparatus that contacts at least the transfermember of the master material and hardens a portion transformed to thetransfer shape; and a control portion for controlling at least themoving apparatus and the hardening apparatus to drive the movingapparatus so that the transfer member successively contacts differentpositions of the master material and the transfer shape is transferredto different positions of the master material more than once.

A seventh aspect of the invention is a stamper production systemincluding: a master production apparatus used to produce a master havingat least one transfer plane shaped equally to a lens surface of a lens;and a stamper production apparatus that includes a reversely shapedplane shaped reversely to a transfer plane of a master produced by themaster production apparatus and produces a stamper used to produce alens by transferring the reversely shaped plane to a lens material. Themaster production apparatus includes: a supporting portion that supportsa master material used to produce a master; a transfer member that iscontactably provided for the master material supported by the supportingportion and includes a transfer shape formed reversely to an asphericallens portion of the lens; a moving apparatus that moves at least one ofthe supporting portion and the transfer member so as to contact andseparate the transfer member from the master material supported by thesupporting portion; a hardening apparatus that contacts at least thetransfer member of the master material and hardens a portion transformedto the transfer shape; and a control portion for controlling at leastthe moving apparatus and the hardening apparatus to drive the movingapparatus so that the transfer member successively contacts differentpositions of the master material and the transfer shape is transferredto different positions of the master material more than once.

An eighth aspect of the invention is a process for producing a lensincluding: a stamper production step of producing a stamper having areversely shaped plane shaped reversely to a lens surface of a lens; anda lens production step of producing the lens by transferring thereversely shaped plane to a lens material. The stamper production stepincludes: a transformation step of using an optically transparentstamper material, making contact between the stamper material and atransfer member including a transfer shape formed equally to anaspherical lens portion of the lens, and transforming the stampermaterial to the transfer shape; a hardening step of hardening at least atransformed portion of the stamper material; and a separation step ofseparating the stamper material from the transfer member. The transferstep of transferring the transfer shape to the stamper material isrepeated more than once so that the transfer member successivelycontacts different positions on the stamper material at thetransformation step. The lens production step includes: a transformationstep of using a lens material made of a light curing material andtransforming the lens material to a reversely shaped plane of thestamper; and a hardening step of hardening the lens material byradiating light to the lens material so that the light passes throughthe stamper.

A ninth aspect of the invention is a process for producing a stamperincluding: a transformation step of using an optically transparentstamper material, making contact between the stamper material and atransfer member including a transfer shape formed equally to anaspherical lens portion of a lens, and transforming the stamper materialto the transfer shape; a hardening step of hardening at least atransformed portion of the stamper material; and a separation step ofseparating the stamper material from the transfer member. The transferstep of transferring the transfer shape to the stamper material isrepeated more than once so that the transfer member successivelycontacts different positions on the stamper material at thetransformation step. A stamper is used to produce a lens. A lensmaterial such as alight curing material is used. The lens material istransformed to a reversely shaped plane of a stamper, the reverselyshaped plane being formed reversely to a lens surface of a lens. Lightis radiated to the transformed lens material so as to pass through thestamper and harden the lens material.

A tenth aspect of the invention is a stamper production apparatusincluding: a supporting portion that supports an optically transparentstamper material used for producing a stamper having a reversely shapedplane formed reversely to a lens surface of a lens; a transfer memberthat is contactably provided for the stamper material supported by thesupporting portion and includes a transfer shape formed equally to anaspherical lens portion of a lens; a moving apparatus that moves atleast one of the supporting portion and the transfer member so as tocontact and separate the transfer member from the stamper materialsupported by the supporting portion; a hardening apparatus that contactsat least the transfer member of the stamper material and hardens aportion transformed to the transfer shape; and a control portion forcontrolling at least the moving apparatus and the hardening apparatus todrive the moving apparatus so that the transfer member successivelycontacts different positions of the stamper material and the transfershape is transferred to different positions of the stamper material morethan once. A stamper is produced so as to be used for producing a lens.A lens material such as a light curing material is used. The lensmaterial is transformed to a reversely shaped plane of a stamper, thereversely shaped plane being formed reversely to a lens surface of alens. Light is radiated to the transformed lens material so as to passthrough the stamper and harden the lens material.

EFFECT OF THE INVENTION

The present invention can provide a method of molding and a moldingapparatus capable of more highly precisely molding molded articles suchas a lens than conventional technologies, to provide a process forproducing a higher precision lens than conventional ones and a processfor producing an associated stamper, and to provide a master productionapparatus, a stamper production system, and a stamper productionapparatus.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 shows a first optical part production system according to theinvention;

FIG. 2 shows a process of producing a lens in the optical partproduction system shown in FIG. 1;

FIGS. 3A to 3D are a first explanatory diagram showing a process ofproducing a lens in the optical part production system shown in FIG. 1;

FIGS. 4E to 4H are a second explanatory diagram showing a process ofproducing optical parts in the optical part production system shown inFIG. 1;

FIG. 5 shows an imaging apparatus using a lens produced in the opticalpart production system shown in FIG. 1;

FIGS. 6A and 6B show a schematic configuration of a molding apparatusaccording to an embodiment of the invention, wherein FIG. 6A is a planview and FIG. 6B is a left side view;

FIG. 7 is a partially sectional view showing a transfer member and awafer included in the molding apparatus according to the embodiment ofthe invention;

FIG. 8 is an explanatory diagram showing a modification example of aprocess to inject a light curing resin into a hole formed in a waferused for the molding apparatus according to the embodiment of theinvention;

FIG. 9 is a partially sectional view showing a first modificationexample of a transfer member and a wafer used for the molding apparatusaccording to the embodiment of the invention;

FIG. 10 is a partially sectional view showing a second modificationexample of a transfer member and a wafer used for the molding apparatusaccording to the embodiment of the invention;

FIG. 11 is a block diagram showing a control apparatus included in themolding apparatus according to the embodiment of the invention;

FIG. 12 is a first flowchart showing operations of the molding apparatusaccording to the embodiment of the invention;

FIG. 13 is a first flowchart showing transfer operations of the moldingapparatus according to the embodiment of the invention;

FIG. 14 is a second flowchart showing operations of the moldingapparatus according to the embodiment of the invention;

FIG. 15 is a second flowchart showing transfer operations of the moldingapparatus according to the embodiment of the invention;

FIG. 16 shows a stamper production apparatus included in the opticalpart production system shown in FIG. 1;

FIG. 17 shows a lens array production apparatus that is included in theoptical part production system shown in FIG. 1 and uses a light curingresin as a lens array material;

FIG. 18 is a first diagram illustrating a process for hardening a lightcuring resin using the lens array production apparatus shown in FIG. 17;

FIG. 19 is a second diagram illustrating a process for hardening a lightcuring resin using the lens array production apparatus shown in FIG. 17;

FIG. 20 shows a modification example of the lens array productionapparatus that is included in the optical part production system shownin FIG. 1 and uses a heat curing resin as a lens array material;

FIG. 21 shows a separation apparatus included in the optical partproduction system shown in FIG. 1;

FIG. 22 shows a second optical part production system according to theinvention;

FIG. 23 shows a process of producing a lens in the optical partproduction system shown in FIG. 22;

FIGS. 24C, 24D, 24G and 24H are an explanatory diagram showing a processof producing a lens in the optical part production system shown in FIG.22;

FIG. 25 shows a lens array production apparatus included in the opticalpart production system shown in FIG. 22;

FIG. 26 illustrates a process for hardening a light curing resin usingthe lens array production apparatus shown in FIG. 25;

FIG. 27 shows a first modification example of the lens array productionapparatus included in the optical part production system shown in FIG.22;

FIG. 28 illustrates a process for hardening a light curing resin using afirst modification example of the lens array production apparatus shownin FIG. 27;

FIG. 29 shows a second modification example of the lens array productionapparatus included in the optical part production system shown in FIG.22;

FIG. 30 illustrates a process for hardening a light curing resin using asecond modification example of the lens array production apparatus shownin FIG. 29;

FIG. 31 shows an enlarged view around the transfer member of the moldingapparatus that is producing a lens array; and

FIGS. 32A to 32C show a process of producing a lens using the lens arrayproduced by the molding apparatus.

EXPLANATIONS OF LETTERS OR NUMERALS

-   5: optical part production system-   10: molding apparatus-   60: light irradiation unit-   90: protruded portion-   200: control apparatus-   300: stamper production apparatus-   302: container-   304: electrolytic solution-   306: heating apparatus-   308: Ni pellet-   310: power supply-   400: lens array production apparatus-   402: resin supply apparatus-   416: light irradiation unit-   418: radiation emitter-   430: heating apparatus-   432: heating element-   500: separation apparatus-   600: master-   602: first transfer plane-   604: second transfer plane-   606: convex portion-   608: concave portion-   620: first stamper-   622: first reversely shaped plane-   626: second stamper-   628: second reversely shaped plane-   640: stamper-   642: reversely shaped plane-   643: depressed portion-   644: substrate-   650: lens array-   652: first optical function plane-   654: second optical function plane-   656: convex lens portion-   658: concave lens portion-   680: lens array-   682: optical function plane-   684: convex lens portion

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described with reference tothe accompanying drawings.

FIG. 1 shows a first optical part production system according to theinvention. FIG. 2 shows a process of producing a lens using the firstoptical part production system 5 according to the invention. The lens isto be used as a molded article.

The optical part production system 5 is used to produce optical partssuch as a lens array and a lens used for a camera provided with a lightreceiving element such as a CMOS (Complementary Metal OxideSemiconductor) sensor. The optical part production system 5 provides thelens production method according to the embodiment of the invention. Asshown in FIG. 1, the optical part production system 5 includes a moldingapparatus 10, a stamper production apparatus 300, a lens arrayproduction apparatus 400, and a separation apparatus 500. The moldingapparatus 10 is used as a master production apparatus for producing amaster. The molding apparatus 10 and the stamper production apparatus300 configure a stamper production system according to the embodiment ofthe invention.

FIG. 2 shows how a lens is produced. A master is produced at Step 5100.A stamper is produced at Step S200. A lens array is produced at StepS300. The lens is produced at Step S400. The lens produced at Step S400can be used for camera production, for example (see Step S500). Themolding apparatus 10 is used for the process of producing the master atStep S100. The stamper production apparatus 300 is used for the processof producing the stamper at Step S200. The lens array productionapparatus 400 is used for the process of producing the lens array atStep S300. The separation apparatus 500 is used for the process ofproducing the lens at Step S400.

FIGS. 3A to 3D and FIGS. 4E to 4H illustrate steps of producing a lens700 using the optical part production system 5 in the order of theprocesses shown in FIG. 2. The steps described here are used to producea lens array 650 or a lens array 680 to be used as a molded article or alens. The lens array 650 or the lens array 680 is cut or separated toproduce the lens 700.

As shown in FIG. 3D, the lens array 650 provides respective moldedplanes. The lens array 650 includes a first optical function plane 652and a second optical function plane 654 to be used as lens planes. Thefirst optical function plane 652 includes multiple convex lens portions656 that are formed in line and are used as optical parts. The secondoptical function plane 654 includes multiple concave lens portions 658that are formed in line and are used as optical parts.

The optical part production system 5 produces the lens array 650 thatincludes the first optical function plane 652 on one side and the secondoptical function plane 654 on the other side. Instead, as shown in FIG.3D, the optical part production system 5 can also produce the lens array680 that includes an optical function plane 682 only on one side. Theoptical function plane 682 includes multiple convex lens portions 684that are used as optical parts and are formed in line.

To produce the lens 700, a master 600 is first produced as shown in FIG.3A. The master 600 is used as a master having at least one transferplane shaped identically to the first optical function plane 652 and thesecond optical function plane 654 provided for the lens array 650. Themaster 600 includes a first transfer plane 602 shaped identically to thefirst optical function plane 652 and a second transfer plane 604 shapedidentically to the second optical function plane 654. Convex portions606 are formed on the transfer plane 602 at the same interval as convexlens portions 656 and are shaped equally to the convex lens portions656. The number of convex portions 606 is the same as that of the convexlens portions 656. Concave portions 608 are formed on the secondtransfer plane 604 at the same interval as concave lens portions 658 andare shaped equally to the concave lens portions 658. The number ofconcave portions 608 is the same as that of the concave lens portions658.

While there has been described the master 600 used for producing thelens array 650, the production of the lens array 680 uses a mastershaped equally to the lens array 680 instead of the master 600. Themethod of producing the master 600 will be described later in moredetail.

The optical part production system 5 produces the master 600 and thenthe stamper. As shown in FIGS. 3B and 3C, the optical part productionsystem 5 produces a first stamper 620 and a second stamper 626 bothprovided for the master 600. The first stamper 620 includes a firstreversely shaped plane 622 shaped oppositely or reversely to the firsttransfer plane 602. The second stamper 626 includes a second reverselyshaped plane 628 shaped oppositely or reversely to the second transferplane 604.

FIG. 3B shows production of the first stamper 620 and the second stamper626. Electroforming is performed to deposit metal ion such as Ni(nickel) on the first transfer plane 602 and the second transfer plane604 of the master 600. The metal ion is deposited to produce the firststamper 620 and the second stamper 626 that are then separated from themaster 600.

There has been described the method of producing the first stamper 620and the second stamper 626 used to produce the lens array 650. Insteadof the first stamper 620 and the second stamper 626, one stamper 640 isproduced to produce the lens array 680. The stamper 640 includes areversely shaped plane 642 for a master shaped equally to the lens array680. The production of the first stamper 620, the second stamper 626,and the stamper 640 will be described later in more detail.

Following the production of the first stamper 620 and the second stamper626, the optical part production system 5 produces the lens array 650.To do this, for example, a nanoimprint technology is used to transferthe first reversely shaped plane 622 of the first stamper 620 and thesecond reversely shaped plane 628 of the second stamper 626 to a lightcuring resin used as a molding material. As shown in FIG. 4E, the secondstamper 626 is placed so as to position the reversely shaped plane 628upward. A resin supply apparatus 402 is used to supply the secondreversely shaped plane 628 with the light curing resin. The firstreversely shaped plane 622 of the first stamper 620 is overlaid on thesupplied resin so as to position the first reversely shaped plane 622downward. The light curing resin is transformed to the first reverselyshaped plane 622 and the second reversely shaped plane 628. The light isthen applied to the transformed light curing resin to harden it and thusproduce the lens array 650.

There has been described the production of the lens array 650 using thefirst stamper 620 and the second stamper 626. Similarly, the stamper 640may be used to produce the lens array 680. The above-mentioned techniqueuses the light curing resin as a mold material of the lens array 650.The light is radiated to the light curing resin to harden it. Instead, aheat curing resin may be used as a material of the lens array 650. Theheat curing resin may be heated to be hardened. The production of thelens array 650 and the lens array 680 will be described later in moredetail.

As shown in FIGS. 4F and 4G, the molded lens arrays 650 and 680 arecemented. Multiple sets of the molded lens arrays 650 and 680 may becemented as needed. There is provided a cemented lens array 690including multiple cemented lens arrays (cementing step). The cementedlens array 690 is divided so as to provide at least one lens portion(dividing step). The lens portion signifies at least either the convexlens portion 656 and the concave lens portion 658 or the convex lensportion 684. As shown in FIG. 4H, a lens 700 is produced so as toinclude at least one convex lens portion 656. For example, the lens 700may be attached to a light receiving element of a CMOS sensor forproducing cameras. A produced camera may be built in a mobile telephone,for example.

The lens array 650 and the lens array 680 may be divided without beingcemented and may be used as a single-layer lens. The lens array 650, thelens array 680, and the cemented lens array 690 may be used as they arewithout being divided.

FIG. 5 shows a camera 720 that uses the lens 700.

A light receiving element 722 is attached to the lens 700 to produce thecamera 720. The light receiving element 722 uses a COMS sensor, forexample, and includes a photodiode region 724. The light receivingelement 722 converts input light into an electric signal to recordvideo. The light receiving element 722 may use a CCD sensor instead ofthe COMS sensor.

The light from above the camera 720 is refracted through the lens 700 soas to be converged and enters the photodiode region 724. The photodioderegion 724 converts the incident light into an electric signal.

FIGS. 6A and 6B show the molding apparatus 10. As mentioned above, themolding apparatus 10 is used for molding the master 600. The moldingapparatus 10 includes a base 12 that is placed on a mounting surface. Amovable base 24 is supported on the base 12. A support base 14 isfurther supported on the top of the movable base 24.

The movable base 24 includes a lower part 26 and an upper part 27. Thelower part 26 includes a projecting portion 25 that is formed so as toproject downward. The upper part 27 is positioned over the lower part26. The projecting portion 25 is attached to the base 12 so as to engagein a groove (not shown) that is formed in an upper surface 12 a of thebase 12 along a y-axis direction. The movable base 24 is guided throughthe groove in the y-axis direction and is movable on the surface 12 a inthe y-axis direction. The projecting portion 25 engages with a feedscrew 28. The feed screw 28 is rotatably supported at bearings 30 by thebase 12 so that the shaft direction (longer direction) corresponds tothe y-axis direction. A left end of the feed screw in FIG. 1 connectswith a y-axis motor 32 that is fixed to the base 12. Rotating the y-axismotor 32 transmits a driving force to the projecting portion 25 via thefeed screw 28 to move the movable base 24 in the y-axis direction.Controlling the rotation direction of the y-axis motor 32 determines inwhich direction the movable base is to be moved along the y-axis.

A θ-axis motor 34 is provided for the upper part 27 of the movable base24. The θ-axis motor 34 rotates the upper part 27 of the movable base 24around a rotation axis perpendicular to the z-axis with reference to thelower part 26 of the movable base 24. As a whole, the movable base 24 ismovable in the y-axis direction. The upper part 27 is rotatable withreference to the lower part 26.

A wafer W made of glass, for example, is mounted on the support base 14.The support base 14 supports the mounted wafer W against the directionof gravitational force. The support base 14 is coupled with a drivingsource 18 including a motor, for example. The support base 14 is capableof moving with the wafer W with reference to the upper part 27 of themovable base 24. The support base 14 is configured as a turning tableused for a spin coat technology that applies resin to the wafer W. Thatis, the support base 14 is configured as a turning table used for thespin coat. The spin coat is used to apply resin to the wafer W. Instead,multiple holes h2 (see FIG. 7) may be formed in the wafer W. The moldingapparatus 10 may be provided with an injection apparatus (not shown) forinjecting the resin. The injection apparatus may inject the resin intothe holes h2 formed in the wafer W.

The support base 14 may use an optically transparent material such asglass so as to pass light radiated from a light irradiation unit 60 tobe described later. A mounting/dismounting apparatus (not shown) such asa robot may or an operator may manually mount the wafer W on the supportbase 14 and dismount the wafer W mounted on the support base 14.

The upper part 27 of the movable base 24 is provided with a supplyapparatus 36 that supplies the wafer W with a light curing resin used asa master material. A reservoir portion 40 for reserving the light curingresin is connected to the supply apparatus 36 through a valve 38. Thesupply apparatus 36 is capable of supplying the light curing resinreserved in the reservoir portion 40 so that the light curing resindrops from above approximately at the center of the approximatelycircular wafer W (disk-shaped). The light curing resin supplied onto thewafer W spreads due to a centrifugal force from the support base 14 thatrotates for a specified time period. The light curing resin isconsequently applied to the surface of the wafer W with an approximatelyuniform thickness.

The upper part 27 of the movable base 24 is provided with the lightirradiation unit 60 used as a hardening apparatus. The light irradiationunit 60 is connected to a light source 70 through an optical fiber 68used as light transmission means. The light irradiation unit 60 is usedto radiate light to the light curing resin applied to the wafer W.According to the embodiment, the light irradiation unit 60 is providedbelow the support base 14, the wafer W, and the light curing resinapplied to the wafer W opposite to a transfer member 62 to be describedlater. Accordingly, the light can be radiated to the light curing resinwithout being interrupted by the transfer member 62 while the transfermember 62 remains in contact with the light curing resin.

The movable base 24 is attached to the base 12 and a supporting post 42is fixed thereto. A movable unit 44 is attached to the supporting post42 so as to be movable in an x-axis direction with reference to thesupporting post 42. The movable unit 44 includes a left-sided part 48positioned to the left of the drawing and a right-sided part 50 fixed tothe left-sided part 48. The left-sided part 48 is supported by thesupporting post 42 so as to be movable in the x-axis direction and isengaged with a feed screw 52. The feed screw 52 is rotatably attached tothe supporting post 42 by a bearing 54 so that the screw shaft directioncorresponds to the x-axis direction.

One end of the feed screw 52 is coupled with an x-axis motor 56 attachedto the supporting post 42. Rotating the x-axis motor 56 transmits adriving force of the x-axis motor 56 to the left-sided part 48 via thefeed screw 52. The left-sided part 48 and the right-sided part 50 of themovable unit 44 move together in the x-axis direction. Controlling therotation direction of the x-axis motor 56 determines in which directionthe movable unit 44 is to be moved along the x-axis.

The right-sided part 50 of the movable unit 44 is attached with thetransfer member 62 via a supporting member 45. The supporting member 45is attached to the movable unit 44 so as to be movable in the z-axisdirection. The movable unit 45 includes: a projecting portion 46projecting toward the left in FIG. 1; and a supporting portion 47 fixedto the projecting portion 46. The transfer member 62 is detachablyattached to a downward surface of the supporting portion 47, forexample. One of the transfer members 62 can be selected from differentlyshaped and sized ones depending on shapes of lenses to be formed andtypes of resin used as articles to be molded.

A feed screw 58 is screwed through the projecting portion 46. The feedscrew 58 is rotatably attached to the right-sided part 50 of the movableunit 44 using bearings 61 so that the screw axis direction correspondsto the z-axis direction. The top end of the feed screw 58 is coupled toa z-axis motor 64 for the supporting member. Rotating the z-axis motor64 for the supporting member transmits a driving force to the supportingmember 45 via the feed screw 58. The supporting member 45 and thetransfer member 62 supported by the supporting member 45 move togetherin the z-axis direction.

A detection apparatus 72 is attached to the right-sided part 50 of themovable unit 44 so as to be vertically movable (in the z-axis direction)independently of the supporting member 45. The detection apparatus 72 isused as detection means for detecting positions of the wafer W and thetransfer member 62. The detection apparatus 72 includes: an imagingportion 74 exemplified by a CCD camera; a lens unit 76 provided for theimaging portion 74 near the wafer W; and a light 78 used as illuminatingmeans for ensuring brightness for excellent imaging by the imagingportion 74. The detection apparatus 72 is attached with a z-axis motor80 for the detection apparatus. The z-axis motor 80 for the detectionapparatus is used as a driving source for moving the detection apparatus72 in the z-axis direction with reference to the movable unit 44.Vertically moving the detection apparatus 72 allows the imaging portion74 to focus on the transfer member 62 or the like.

As mentioned above, the supporting member 45 is attached to the movableunit 44 so as to be movable in the z-axis direction. The movable unit 44is attached to the supporting post 42 so as to be movable in the x-axisdirection. Accordingly, controlling the x-axis motor 56 and the z-axismotor 64 for the supporting member can move the transfer member 62 alongwith the supporting member 45 in the x-axis and z-axis directions. Asmentioned above, driving the y-axis motor 32 and the θ-axis motor 34moves and rotates the support base 14 along with the movable base 24 inthe y-axis direction. Therefore, controlling the y-axis motor 32, thex-axis motor 56, the z-axis motor 64 for the supporting member, and theθ-axis motor 34 can change the relative positional relation among thewafer W, the light irradiation unit 60, and the transfer member 62.

Changing the relative positional relation between the wafer Wand thetransfer member 62 can allow the light curing resin applied to the waferW and the transfer member 62 to contact or separate from each other.According to the embodiment, the y-axis motor 32, the x-axis motor 56,the z-axis motor 64 for the supporting member, and the θ-axis motor 34as well as the feed screws 28, 52, and 58 are used as moving apparatusesfor moving at least one of the light curing resin and the transfermember 62 so that the light curing resin and the transfer member 62contact or separate from each other. Control over the y-axis motor 32,the x-axis motor 56, the z-axis motor 64 for the supporting member, andthe θ-axis motor 34 will be described later in detail.

According to the embodiment mentioned above, the light curing resinincludes resins such as an ultraviolet curing resin that hardens due toradiated invisible light. The above-mentioned embodiment uses the lightcuring resin as a master material for the master 600. The mastermaterial is capable of being transformed to the shape of the transfermember 62 when the transfer member 62 is contacted or pressed. It ispossible to use appropriate materials that can harden while thetransformed state is maintained. For example, it is possible to use theheat curing resin that hardens due to heating. The embodiment uses thelight irradiation unit for hardening the light curing resin as ahardening apparatus for hardening an article to be molded. Anappropriate hardening apparatus may be selected in accordance with amaterial used as an article to be molded. For example, a heater forheating a heat curing resin may be selected as the hardening apparatuswhen the heat curing resin is used as an article to be molded asmentioned above.

FIG. 7 shows the transfer member 62 and the wafer W in detail.

As shown in FIG. 7, the wafer W is structured so that a holding plate W2is layered over a substrate W1. The substrate W1 is made of an opticallytransparent material such as glass, for example, and has a thickness t1of 400μ. The holding plate W2 is used to hold a light curing resin at aspecified position when the resin, before being hardened, is liquid andhighly fluid, for example. The holding plate W2 is made of silicon, forexample, and has a thickness t2 of 725μ, for example. Multiplethrough-holes h are vertically formed in the holding plate W2. Eachthrough-hole is conic so as to be narrowed from top to bottom.

Multiple through-holes h1 are formed in the holding plate W2 positionedabove the substrate W1. The substrate W1 seals the bottom of thethrough-hole h1. As a result, the substrate W1 contains multiple concaveholes h2 so formed as to be sealed at the bottom and opened toward thetop.

The transfer member 62 is made of metal, for example. The transfermember 62 is shaped equally to a lens portion 1312 (e.g., see FIGS. 32Ato 32C to be described later) used as an aspherical lens portion or hasa transfer shape formed reversely to the lens portion 1312. The transfershape is formed as a protruded portion 90, for example. The transfermember 62 is used to transform the light curing resin to the shape ofthe protruded portion 90. Hardening the transformed light curing resinsignifies transfer of the transfer shape formed on the transfer member62 to the light curing resin. The protruded portion 90 is aspherical andis formed by mechanically processing the metal transfer member 62 suchas machining using machine tools including a machining center, forexample.

An article to be molded needs to be highly accurately molded bytransferring the transfer shape formed on the transfer member 62.Accordingly, for example, the transfer shape needs to be highlyaccurately formed on the transfer member 62 as the protruded portion 90.The protruded portion 90 has an aspherical shape and is difficult toprocess. Processing of the transfer member 62 often requires a long timeand high costs. For this reason, the embodiment forms only one transfershape on the transfer member 62 to shorten the process time and reducethe costs.

The aspherical shape signifies a surface shape other than a curvedsurface shape that corresponds to part of a spherical surface. Inoptical parts such as a lens portion 312, the aspherical shape isexpressed by the following aspherical shape equation (1).

z=C·ρ ²/[1+{1−(1+k1)·C ²·ρ²}^(1/2)]  equation (1)

where C denotes the inverse of curvature radius R; p denotes the heightof a mirror face from an optical axis; z denotes the sag quantity; andk1 denotes the constant of the cone.

In FIG. 7, the spin coat is used to apply the light curing resin to theentire upward surface of the wafer W. The applied light curing resinflows into the through hole h of the holding plate W2 so as to be heldby the holding plate W2. As shown in FIG. 7, the transfer member 62contacts the held light curing resin so that at least the protrudedportion 90 contacts the light curing resin. In this state, the lightirradiation unit 60 is used to radiate light to and near a position ofthe light curing resin in contact with the protruded portion 90. Thelight curing resin hardens to transfer the transfer shape formed on theprotruded portion to the light curing resin. After the light curingresin hardens, the transfer member 62 is separated from the wafer W asindicated by a dash-double-dot line in FIG. 7. As indicated by an arrowin FIG. 7, for example, the transfer member 62 moves so as to contact anunhardened resin held in a through hole h adjacent to the through hole hthat holds the hardened resin.

There has been described the case where the spin coat is used to applythe light curing resin to the entire upward surface of the wafer W.Instead, as shown in FIG. 8, an injection apparatus (not shown) may beused to inject the light curing resin into multiple holes h2 formed inthe wafer W. The transfer member 62 contacts the light curing resin heldby the holding plate W2 so that at least the protruded portion 90contacts the light curing resin. The protruded portion 90 contacts thelight curing resin held in one hole h2 and the light is radiated. Atthis time, the light curing resin is already injected in a hole h2adjacent to that hole h2. After the light curing resin hardens in onehole h2, the transfer member 62 is separated from the wafer W asindicated by a dash-double-dot line in FIG. 8. As indicated by an arrowin FIG. 8, for example, the transfer member 62 moves so as to contact anunhardened resin held in a hole h2 adjacent to the hole h2 that holdsthe hardened resin. The transfer member 62 now contacts the resin heldin that adjacent hole h2. Before the transfer member 62 moves to afurther adjacent hole h2, the injection apparatus injects the lightcuring resin into a still further adjacent hole h2.

As shown in FIG. 8, the injection apparatus is used to inject the lightcuring resin into the hole h2. The light curing resin is transformed tothe transfer member (transformation step). For this purpose, the lightcuring resin is injected into the wafer W where multiple holes h2 areformed in advance (injection step). The transfer member 62 contacts thelight curing resin injected into the hole h2 (contact step). Totransform the light curing resin, the light curing resin is injectedinto the hole h2 (injection step) and the transfer member 62 contactsthe light curing resin injected into the hole h2 (contact step). Inaddition, the injection step and the contact step are alternatelyrepeated twice or more.

FIG. 9 shows a first modification example of the wafer W. The wafer Waccording to the above-mentioned embodiment uses a layer of thesubstrate W1 and the holding plate W2. A substrate W1 according to thefirst modification example uses only a holding plate W2. When thesubstrate W1 according to the first modification example is used, theconfiguration of the molding apparatus 10 needs to be modified so as tobe capable of the following. The transfer member 62 contacts the holdingplate W2 from below so as to cover at least one of through holes h1 frombelow. The light curing resin is supplied from above into the hole h2that is formed by being covered from below. The light is radiated fromabove to the light curing resin supplied to the hole h2. The wafer Waccording to the first modification example is used as follows. Afterthe light curing resin injected into the hole h2 hardens, the transfermember 62 moves so as to cover the adjacent through hole h1 from below.The injection apparatus then injects the light curing resin into theadjacent hole h2 that is formed by covering the through hole h1. FIG. 8uses the same reference numerals to depict the same parts or componentsas those for the wafer W according to the above-mentioned embodiment anda detailed description is omitted for simplicity.

As mentioned above, the holding plate W2 holds the light curing resinwhen the wafer W to be used includes or is equivalent to the holdingplate W2. The light curing resin is available at multiple small-volumespaces in small quantity. When not held by the holding plate W2, thelight curing resin is continuously available all over the wafer Wsurface. When the light curing resin shrinks, the accumulated shrinkagecauses an error between the position to transfer the shape of thetransfer member 62 and an intended position. The holding plate W2 cansolve this problem. It is possible to decrease the quantity of lightcuring resin to be used in comparison with a case of applying the lightcuring resin all over the substrate W1 surface without using the holdingplate W2.

FIG. 10 shows a second modification example of the wafer W.

The wafer W according to the above-mentioned embodiments uses a layer ofthe substrate W1 and the holding plate W2. According to the secondmodification example, however, the wafer W includes the substrate W1without using the holding plate W2. When the wafer W according to thesecond modification example is used, the spin coat is used to apply thelight curing resin all over the wafer W surface. The transfer member 62sequentially transfers the shape to the light curing resin applied tothe wafer W.

Since the holding plate W2 is unavailable, the light curing resin isapplied all over the surface of the wafer W according to the secondmodification example. When the light curing resin shrinks, theaccumulated shrinkage causes an error between the position to transferthe shape of the transfer member 62 and an intended position. To preventsuch error from occurring, it is desirable to change a pitch distancebetween positions for contact of the transfer member 62 with the lightcuring resin in accordance with the shrinkage of the light curing resinto be used. That is, there is a pitch distance between one position fortransferring the transfer member 62 and another position that isadjacent to that position and allows the transfer member to contact thelight curing resin. It is desirable to configure and change that pitchdistance so as to be longer than an intended pitch distance after thelight curing resin to be used hardens in accordance with a shrinkingpercentage. FIG. 10 uses the same reference numerals to depict the sameparts or components as those for the wafer W according to theabove-mentioned embodiment and a detailed description is omitted forsimplicity.

FIG. 11 is a block diagram showing a control apparatus 200 included inthe molding apparatus 10.

As shown in FIG. 11, the control apparatus 200 includes a main controlportion 204 supplied with outputs from the detection apparatus 72 via animage recognition apparatus 202 that recognizes an image captured by thedetection apparatus 72. The main control portion 204 controls a motorcontrol circuit 206 to control the y-axis motor 32, the x-axis motor 56,the z-axis motor for the supporting member 64, and the θ-axis motor 34.The main control portion 204 controls a light source drive circuit 208to control the light source 70. The main control portion 204 controls amotor control circuit 210 to control the z-axis motor 80 for thedetection apparatus. The main control portion 204 controls a valve drivecircuit 212 to control the valve 38. The main control portion 204controls a driving source control circuit 214 to control the drivingsource 18. As mentioned above, the molding apparatus 10 may be providedwith an injection apparatus (not shown) that injects the light curingresin into the hole h2 formed in the wafer W. In this case, the controlapparatus 200 also controls the injection apparatus.

FIG. 12 is a first flowchart showing control of the control apparatus200 over the molding apparatus 10 and diagrams steps for producing themaster 600. The first flowchart shows steps of applying the light curingresin all over the wafer W using the spin coat, for example.

When a sequence of steps starts, Step S102 performs a mounting step ofmounting the wafer W on the support base 14. Step S104 performs a lightcuring resin application step of applying the light curing resin to thewafer W. During the light curing resin application step, the maincontrol portion 204 controls the valve drive circuit 212 to open thevalve 38 for a predetermined time period and supply the light curingresin to the surface of the wafer W. After completely supplying thelight curing resin, the main control portion 204 controls the drivingsource control circuit 214 to drive the driving source 18 for aspecified time period. The driving source 18 is driven to rotate thesupport base 14. Due to a centrifugal force, the light curing resinsupplied to the wafer W mounted on the support base 14 spreads almostevenly over the surface of the wafer W.

Step S106 performs a transfer step of transferring the transfer shapeformed on the transfer member 62 to the light curing resin. The transferstep at Step S106 will be described later in detail.

Step S108 determines whether or not all the transfer steps arecompleted. For example, the transfer step may be repeated 1500 through2400 times. Step S106 determines whether or not the last transfer stepis reached. Control returns to Step S106 when Step S108 determines thatthe last transfer step is not reached. Control proceeds to Step S110when Step S108 determines that the last transfer step is reached.

Since the transfer is completed on the light curing resin applied to thewafer W, Step S110 transports the water W mounted on the support base 14outside the molding apparatus 10. The molding apparatus 10 may notinclude an apparatus such as a robot that mounts the wafer W on thesupport base 14 and transports the wafer W from the molding apparatus10. In this case, an operator manually mounts the wafer W on the supportbase 14 and removes the wafer W from the molding apparatus 10. The maincontrol portion 204 omits control over the operations at Steps S102 andS110.

FIG. 13 is a first flowchart showing the transfer step of the controlapparatus 200. The flowchart shows the detail of control over thetransfer step (Step S106) for transferring the transfer shape formed onthe transfer member 62 to the heat curing resin when, for example, thespin coat is used to apply the light curing resin to the entire surfaceof the wafer W.

When the transfer step starts, Step S106 a performs a transformationstep of transforming the light curing resin applied to the wafer W inaccordance with the transfer shape formed on the transfer member 62. AtStep S106 a, the main control portion 204 controls the motor controlcircuit 206 to drive the y-axis motor 32, the x-axis motor 56, thez-axis motor 64 for the supporting member, and the θ-axis motor 34. Atleast one of the transfer member 62 and the support base 14 is moved sothat the transfer member 62 contacts a specified position of the lightcuring resin applied to the wafer W to transform the light curingmaterial.

The transformation step at Step S106 a may use data that is detected bythe detection apparatus 72 and is image-processed by the imagerecognition apparatus 202. Based on the data, position correction datamay be generated for the support base 14 and the transfer member 62 sothat the transfer member 62 contacts the light curing resin at a correctposition. Based on the correction data, the main control portion 204 mayprovide control so as to move at lest one of the transfer member 62 andthe support base 14.

The transformation step at Step S106 a transforms the light curing resinto the protruded portion 90 of the transfer member 62. The protrudedportion 90 of the transfer member 62 is aspherically shaped and isprocessed so as to be shaped reversely to an aspherically depressedportion 608 of the master 600. According to the description above, thetransfer member 62 having the protruded portion 90 is used to form thedepressed portion 608 in the master 600. In addition, the transfermember having a depressed portion may be used to form a protrudedportion in the master 600. The step selectively uses the transfer member62 having a transfer portion processed reversely to a shape to beformed.

The type of light curing resin to be used is taken into consideration inchoosing the transfer member 62. Transfer members to be selected areprovided with differently sized and shaped protruded portions 90 inaccordance with shrinking percentages of light curing resins to be usedeven when the same shape is finally formed. That is, the transfer member62 is changed in accordance with shrinkage during formation of the lightcuring resin.

Step S106 b performs a hardening step of hardening the light curingresin that is transformed to the transfer member 62 by contact with thetransfer member 62. That is, the main control portion 204 controls thelight source drive circuit 208 so that the light source 70 radiateslight for a predetermined time period to at least part of the lightcuring resin transformed due to contact with the transfer member 62.After the transfer step at Step S106 b, the light curing resin hardenswhile it is transformed to the lens portion shape. One lens portion isformed on the light curing resin.

Step S106 performs a separation step of separating the hardened lightcuring resin from the transfer member 62. The main control portion 204controls the motor control circuit 206 to drive the z-axis motor 64 forthe supporting member so that the transfer member 62 in contact with theheat curing resin moves upward.

Steps S106 a, S106 b, and S106 c mentioned above are completed toterminate the transfer step as a sequence. Terminating the transfermember forms one depressed portion 608 on the light curing resin. Asshown in FIG. 12, the transfer step is repeated until all transfers arecompleted in accordance with the number of lens portions to be formed.As many depressed portions 608 as the number of repeated transfer stepsare formed on the light curing resin to form the second transfer plane604 of the master 600. While the transfer step is repeated, the controlapparatus 200 controls the transformation step at S106 a so that thetransfer member 62 successively contacts different positions on thelight curing resin.

The same step as mentioned above is performed to form the first transferplane 602 by forming a protruded portion 606 on the other surface of themaster 600 than that forms the second transfer plane 604. At this time,the transfer member 62 is replaced by another whose first transfer plane602 is shaped to form the protruded portion 606. While there has beendescribed the master 600 where the first transfer plane 602 is formed onone surface and the second transfer plane 604 is formed on the othersurface, it may be preferable to independently produce a master havingthe first transfer plane 602 on one surface and another master havingthe second transfer plane on one surface.

FIG. 14 is a second flowchart showing control of the control apparatus200 over the molding apparatus 10 and depicts steps of molding themaster 600. The above-mentioned first flowchart shows the steps ofapplying the light curing resin to the entire surface of the wafer Wusing the spin coat, for example. On the other hand, the secondflowchart shows steps of using an injection apparatus (not shown) toinject the light curing resin into multiple holes h2 (see FIG. 7) formedin the wafer W.

Of the steps of the above-mentioned first flowchart, Step S102 performsthe mounting step of mounting the wafer W on the support base 14, StepS104 applies the light curing resin to the entire surface of the waferW, Step S106 transfers the transfer shape formed on the transfer member62 to the light curing resin, Step S108 determines whether or not allthe transfer steps are completed, and Step S110 transports the wafer Woutside the molding apparatus 10.

On the other hand, the steps of the second flowchart are void of StepS104 that applies the light curing resin to the entire surface of thewafer W. As will be described later, the transfer step at Step S106injects the resin into the hole h2 formed in the wafer W.

FIG. 15 is the second flowchart showing the transfer step of the controlapparatus 200 when the injection apparatus is used to inject the lightcuring resin into the holes h2 formed in the wafer W. The flowchartshows in detail control over the transfer step (Step S106) thattransfers the transfer shape formed on the transfer member 62 to theheat curing resin.

When the transfer step starts, Step S106 a performs a transformationstep of transforming the light curing resin to the transfer shape formedon the transfer member 62. The transformation step includes an injectionstep (Step S106 a 1) and a contact step (Step S106 b 2). Step S106 a 1injects the light curing resin into one of the holes h2 formed on thewafer W. Step S106 b 2 contacts the transfer member 62 with the lightcuring resin that is injected into one of the holes h2 at Step S106 a 1.At Step S106 a, the main control portion 204 controls the injectionapparatus to inject the light curing resin into one of the holes h2formed in the wafer W. The main control portion 204 then controls themotor control circuit 206 to move at least one of the transfer member 62and the support base 14 so that the transfer member 62 contacts the holeh2 injected into one of the holes h2.

Step S106 b performs the hardening step of hardening the light curingresin formed to the transfer member 62. The main control portion 204allows the light source 70 to radiate light to at least the resininjected into the hole h2 at Step S106 a 1. After the hardening step atStep S106 b, the light curing resin injected into the hole h2 hardens astransformed to the shaped of the lens portion.

Step S106 c performs the separation step of separating the transfermember 62 from the hardened light curing resin injected into the holeh2.

A sequence of transfer steps terminates at Steps S106 a 1, S106 a 2,S306 b, and S106 c as mentioned above. When the transfer stepterminates, the light curing resin is injected into one of the holes h2formed in the wafer W. The light curing resin is transformed andhardened in accordance with the transfer shape formed on the transfermember 62 to form one protruded portion 606. As shown in FIG. 14, thetransfer step is repeated as many times as the number of lens portionsto be formed until all the transfer steps terminate. The result is toform as many protruded portions 606 as the number of transfer stepsrepeated on the light curing resin.

FIG. 16 shows the stamper production apparatus 300.

The stamper production apparatus 300 includes a container 302. Thecontainer 302 contains an electrolytic solution 304 such as an Niplating solution. For example, the bottom of the container 302 isprovided with a heating apparatus 306 that heats the electrolyticsolution 304 and keeps it at an appropriate temperature. An Ni pellet308 is placed in the electrolytic solution 304. The stamper productionapparatus 300 includes a power supply 310 that uses the Ni pellet 308 asan anode and the master 600 as a cathode. For example, sputtering isused to form a conductive layer on the surface of the master 600.

When the power supply 310 supplies power, the stamper productionapparatus 300 according to the above-mentioned configuration melts Nifrom the Ni pellet 308 as the anode. Ni is deposited on the platedsurface of the master 600 as the cathode to form a first stamper 620 anda second stamper 626. The first stamper 620 and the second stamper 626are then removed from the master 600 and are used to produce the lensarray 680 as mentioned above.

FIG. 17 shows the lens array production apparatus 400.

As shown in FIG. 17, the lens array production apparatus 400 includes abase 404. A support base 406 is mounted on the base 404. The supportbase 406 is coupled to a driving source 408 such as a motor. The supportbase 406 is provided with a rotating platform 410 used as a rotatingtable for spin coat. The first stamper 620 is mounted on the rotatingplatform 410, for example.

The lens array production apparatus 400 includes the resin supplyapparatus 402, a moving apparatus 414, and a light irradiation unit 416.The resin supply apparatus 402 is used to supply the light curing resinto the first stamper 620 mounted on the rotating platform 410. Themoving apparatus 414 uses a robot arm, for example, and is capable ofholding the second stamper 626 and moving it while holding so as to beplaced on the first stamper 620 mounted on the rotating platform 410.The light irradiation unit 416 radiates light for hardening the lightcuring resin. While FIG. 14 shows only one light irradiation unit 416,it may be preferable to provide multiple light irradiation units 416around the rotating platform 410. For example, four light irradiationunits 416 may be provided at an interval of 90 degrees.

In the lens array production apparatus 400 according to theabove-mentioned configuration, the resin supply apparatus 402 suppliesthe light curing resin to the upward surface (first reversely shapedplane 622) of the first stamper 620 mounted on the rotating platform410. The driving source 408 transmits a driving force to the rotatingplatform 410 that then rotates to spread the light curing resin over thesurface of the first stamper 620. The moving apparatus 414 transportsthe second stamper 626 so as to be stacked on the spread light curingresin. The light curing resin is transformed to the first reverselyshaped plane 622 of the first stamper 620 and the second reverselyshaped plane 628 of the second stamper 626. The light irradiation unit416 radiates light to the transformed light curing resin. Thetransformed light curing resin hardens to produce the lens array 680.

FIG. 18 shows a process in which the light curing resin hardens due tolight radiated from the light irradiation unit 416 for producing thelens array 650.

For example, four light irradiation units 416 (two thereof shown in FIG.18) radiate light to the light curing resin between the first stamper620 and the second stamper 626. The light diffuses through the lightcuring resin so as to reflect between the first reversely shaped plane622 of the first stamper 620 made of Ni and the second reversely shapedplane 628 of the second stamper 626 made of Ni. As a result, the lightcuring resin hardens.

FIG. 19 shows a process in which the light curing resin hardens due tolight radiated from the light irradiation unit 416 for producing thelens array 680.

As shown in FIG. 19, the production of the lens array 680 uses themirror-finished rotating platform 410. The rotating platform 410 is usedas an opposed member opposite to the lens array 650. A substrate 644such as a glass substrate is made of an optically transparent materialand is placed on the surface of the rotating platform 410. The lightcuring resin is spread over the substrate 644. The stamper 640 is placedso as to be stacked on the spread light curing resin. In this state,four light irradiation units 416 (two thereof shown in FIG. 19) radiatelight to the light curing resin between the stamper 640 and thesubstrate 644. As shown in FIG. 19, the light diffuses through the lightcuring resin so as to reflect between the downward surface (reverselyshaped plane 642) of the Ni stamper 640 and the surface of themirror-finished rotating platform 410. As a result, the light curingresin hardens.

FIG. 20 shows a modification example of the lens array productionapparatus 400.

As mentioned above, the lens array production apparatus 400 uses thelight curing resin as a lens array material for the lens array 650 orthe like and provides steps of hardening the light curing resin. On theother hand, the lens array production apparatus 400 according to themodification example uses a heat curing resin as a lens array materialand is capable of providing steps of hardening the heat curing resin.

As shown in FIG. 20, the lens array production apparatus 400 accordingto the modification example is void of the light irradiation unit 416included in the above-mentioned lens array production apparatus 400.Instead, the lens array production apparatus 400 according to themodification example includes a heating apparatus 430 used as heatingmeans for hardening the heat curing resin by heating. The heatingapparatus 430 is mounted on the upward surface of the rotating platform410. The heating apparatus 430 is shaped into a circular plate whosediameter is greater than that of a stamper such as the first stamper 620mounted on the upward surface. The heating apparatus 430 contains aheating element 432 inside. The heating element 432 is supplied withpower from an unshown power supply for heating.

In the lens array production apparatus 400 configured as mentioned aboveaccording to the modification example, the first stamper 620 is placedon the upward surface of the heating apparatus 430. The resin supplyapparatus 402 supplies the heat curing resin to the first reverselyshaped plane 622 of the stamper 620. The reversely shaped plane 628 ofthe second stamper 626 is pressed to contact the heat curing resinsupplied from the resin supply apparatus 402. After the above-mentionedsteps, the heat curing resin is transformed to the shapes of the firstreversely shaped plane 622 of the first stamper 620 and the secondreversely shaped plane 628 of the second stamper 626.

The heating element 432 is supplied with power while the heat curingresin is transformed to the shapes of the first reversely shaped plane622 of the first stamper 620 and the second reversely shaped plane 628of the second stamper 626. The heating element is heated when it issupplied with power. The first stamper 620 made of Ni transmits the heatto the light curing resin. The light curing resin thus hardens.

The above-mentioned lens array production apparatus 400 is configured touse only the light curing resin as a lens array material. The lens arrayproduction apparatus 400 according to the modification example isconfigured to use only the heat curing resin as a lens array material.The lens array production apparatus 400 may be otherwise configured tobe capable of selectively using the light curing resin and the heatcuring resin as lens array materials. In this case, the lens arrayproduction apparatus 400 is provided with the light irradiation unit 416and the heating apparatus 430. When the light curing resin is used, thelight irradiation unit 416 is used to harden the light curing resin.When the heat curing resin is used, the heating apparatus 430 is used toharden the heat curing resin.

FIG. 21 shows the separation apparatus 500.

The separation apparatus 500 includes a mounting base 502 and a laserradiation apparatus 504. The mounting base 502 is used to mount the lensarrays 650 and 680, for example. The laser radiation apparatus 504radiates a laser beam to the lens array 650 mounted on the mounting base502 to cut and separate the lens array 650 or the like. The laserradiation apparatus 504 is provided with a laser light source 508 and ismovably supported by a moving apparatus 506 such as a robot arm.

The separation apparatus 500 radiates a laser beam for cutting andseparating the lens arrays 650 and 680 to produce the lens 700.

FIG. 22 shows a second optical part production system 5 according to theinvention. FIG. 23 shows steps of producing a lens used as a moldedarticle through the use of the second optical part production system 5.The second optical part production system 5 is used for producingoptical parts such as lenses similarly to the first optical partproduction system 5 according to the invention as mentioned above. Thesecond optical part production system 5 provides a method for producingmolded articles according to embodiments of the invention.

As mentioned above, the first optical part production system 5 includesthe molding apparatus 10, the stamper production apparatus 300, the lensarray production apparatus 400, and the separation apparatus 500. Asshown in FIG. 22, however, the second optical part production system 5is void of the stamper production apparatus 300. Instead, the secondoptical part production system 5 includes the molding apparatus 10, thelens array production apparatus 400, and the separation apparatus 500.In the first optical part production system 5, the molding apparatus 10is used as a master production apparatus for producing masters. In thesecond optical part production system, however, the molding apparatus 10is used as a stamper production apparatus for producing stampers.

As mentioned above, the first optical part production system 5 producesa lens as follows. Step S100 produces a master. Step S200 produces astamper. Step S300 produces a lens array. Step S400 produces a lens. Thelens produced at Step S400 is used to produce cameras.

In the second optical part production system 5 as shown in FIG. 23,however, Step S200 produces a stamper. Step S300 produces a lens array.Step S400 produces a lens. The lens produced at Step S400 is used toproduce cameras. Unlike the first optical part production system 5, thesecond optical part production system 5 produces no master.

In the second optical part production system 5, the molding apparatus 10is used at Step S200 for producing the stamper. The lens arrayproduction apparatus 400 is used at Step S300 for producing the lensarray. The separation apparatus 500 is used at Step S400 for producingthe lens.

FIGS. 24C, 24D, 24G and 24H show the steps of producing the lens 700 byusing the second optical part production system 5 in the order of thesteps shown in FIG. 23.

To produce the lens 700, the stamper 640 is produced as shown in FIG.24C. The lens array 680 is produced as shown in FIG. 24D. Depending onneeds, multiple lens arrays 650 are produced or the cemented lens array690 is produced by bonding the lens array 650 to the other lens array asshown in FIG. 24G. The cemented lens array 690 is divided to produce thelens 700 as shown in FIG. 24H.

FIG. 24C shows a partially enlarged view of the stamper 640 produced bythe second optical part production system 5.

As mentioned above, the first optical part production system 5 producesa lightproof stamper made of Ni. On the other hand, the second opticalpart production system 5 produces the stamper 640 using an opticallytransparent material capable of transmitting light. Resin is used as anoptically transparent material. The stamper 640 includes the reverselyshaped plane 642 that is shaped reversely to the optical function plane682 of the lens array 680 as a molded article. As many depressedportions 643 as the convex lens portions 684 are formed on the reverselyshaped plane 642 at the same interval as that of the convex lensportions 684. The depressed portion 643 is shaped reversely to theconvex lens portion 684 of the lens array 680.

As mentioned above, the molding apparatus 10 produces the stamper 640.

That is, the first optical part production system 5 forms the stamper640 having multiple depressed portions 643 through the steps similar tothose of producing the master 600 using the molding apparatus 10. Itshould be noted that an optically transparent resin is used to form thestamper 640.

FIG. 24D shows a partially enlarged view of the lens array 680 producedin the second optical part production system 5.

The lens array 680 is the same as the lens array 680 produced in thefirst optical part production system mentioned above and includes theoptical function plane 682 used as a modeling plane. The opticalfunction plane 682 includes multiple convex lens portions 684 orderlyformed so as to be used as optical parts. As mentioned above, the lensarray production apparatus 400 produces the lens array 680. Theproduction of the lens array 680 using the lens array productionapparatus 400 will be described later in detail.

FIG. 24G shows the cemented lens array 690 produced in the secondoptical part production system 5. FIG. 24G shows an example of bondingtwo lens arrays 680 produced in the second optical part productionsystem 5. The cemented lens array 690 may include the lens array 680bonded to the lens array 650 (see FIGS. 3A to 3D) produced in the firstoptical part production system 5 mentioned above, for example.

FIG. 24H shows the lens 700 produced in the second optical partproduction system 5. Similarly to the first optical part productionsystem 5 mentioned above, the separation apparatus 500 is used forcutting and separating the cemented lens array 690 to produce the lens700. The separation apparatus 500 included in the second optical partproduction system 5 is the same as the separation apparatus 500 (seeFIG. 21) included in the first optical part production system 5mentioned above.

FIG. 25 shows the lens array production apparatus 400 included in thesecond optical part production system 5.

In the first optical part production system 5 mentioned above, the lensarray production apparatus 400 includes multiple light irradiation units416 such as four at an interval of 90 degrees around the rotatingplatform 410. The light irradiation units 416 are placed so as tosideways radiate the light to the light curing resin used for producingthe lens array 680 or the like. On the other hand, the lens arrayproduction apparatus 400 included in the second optical part productionsystem 5 uses, for example, one light irradiation unit 416 so as to becapable of radiating the light from above (opposite the base 404) to thewhole light curing resin used for producing the lens array or the like.

In the lens array production apparatus 400 included in the secondoptical part production system 5 according to the above-mentionedconfiguration, the second stamper 626 made of Ni, for example, ismounted on the rotating platform 410 so that the reversely shaped plane628 faces upward. The resin supply apparatus 402 supplies the lightcuring resin to the second stamper 626. The driving source 408 transmitsa driving force to the rotating platform 410 that then rotates to spreadthe light curing resin over the surface of the first stamper 626. Themoving apparatus 414 transports the optically transparent stamper 640made of an optically transparent material so as to be stacked on thespread light curing resin. The light curing resin is transformed to thereversely shaped plane 628 of the second stamper 626 and the reverselyshaped plane 642 of the second stamper 640. The light irradiation unit416 radiates light to the transformed light curing resin. Thetransformed light curing resin hardens to produce the lens array 680.

As mentioned above, the second stamper 626 mounted on the support base406 is made of a lightproof material such as Ni. Instead, it may bepreferable to use the optically transparent stamper 640 made of anoptically transparent material. On the other hand, the stamper placedfrom above the light curing resin needs to be optically transparent.That stamper cannot be replaced by lightproof stampers such as thesecond stamper 626 made of Ni.

FIG. 26 shows the process of hardening the light curing resin radiatedby light from the light irradiation unit 416 and producing the lensarray 680.

When the light irradiation unit 416 radiates light as shown in FIG. 26,the light passes through the optically transparent stamper 640 andreaches the whole of the light curing resin, and hardens the lightcuring resin without leaving unhardened portions.

FIG. 27 shows the first modification example of the lens arrayproduction apparatus 400 included in the second optical part productionsystem 5.

In the lens array production apparatus 400 of the second optical partproduction system 5 mentioned above, for example, one light irradiationunit 416 is provided above the light curing resin (opposite the base404). On the other hand, the lens array production apparatus 400according to the first modification example includes multiple lightirradiation units 416 such as four at an interval of 90 degrees or eightat an interval of 45 degrees around the rotating platform 410. The lightirradiation units 416 are placed so as to sideways radiate the light tothe light curing resin used for producing the lens array 680 or thelike. The lens array production apparatus 400 according to the firstmodification example uses the rotating platform 410 whose upward surfaceis mirror-finished so as to be capable of reflecting the light.

The lens array production apparatus 400 according to the firstmodification example is used to produce the lens array 680 or the likeas follows. The substrate 644 is placed on the surface of the rotatingplatform 410. For example, the substrate 644 includes a glass substratemade of an optically transparent material. The stamper 640 is placed onthe substrate 644. The stamper 640 is produced by using an opticallytransparent material and is capable of transmitting the light. The lightcuring resin is supplied to the upward surface of the stamper 640. Thesecond stamper 626 is pressed against the supplied light curing resinfrom above. The second stamper 626 is made of Ni, for example, so as tobe lightproof and preferably capable of reflecting the light.

FIG. 28 shows the process of hardening the light curing resin radiatedby light from the light irradiation unit 416 and producing the lensarray 680 in the lens array production apparatus 400 according to thefirst modification example.

The first modification example uses eight light irradiation units 416 ofwhich two are shown in FIG. 28. As shown in FIG. 28, the lightirradiation units 416 radiate light between the second stamper 626 andthe substrate 644. The light diffuses through the light curing resin soas to reflect between the second stamper 626 and the mirror-finishedrotating platform 410. As a result, the light curing resin hardens. Thelight reflects on the rotating platform 410, passes through the stamper640, and reaches the light curing resin.

FIG. 29 shows the second modification example of the lens arrayproduction apparatus 400 included in the second optical part productionsystem 5.

The lens array production apparatus 400 included in the second opticalpart production system 5 mentioned above allows the light irradiationunit 416 to radiate light from above the light curing resin. The lensarray production apparatus 400 according to the first modificationexample mentioned above radiates light from sides of the light curingresin. On the other hand, the lens array production apparatus 400according to the second modification example radiates light from belowthe light curing resin. The light irradiation unit 416 used for thesecond modification example is mounted on the upward surface of therotating platform 410. The light irradiation unit 416 is provided with aradiation emitter 418. The radiation emitter 418 is shaped into acircular plate whose diameter is greater than that of a stamper such asthe stamper 640 mounted on the rotating platform 410. The radiationemitter 418 contains a radiation area at least larger than an area forspreading the light curing resin to be hardened. The radiation emitter418 is supplied with power from an unshown power supply to radiatelight.

The lens array production apparatus 400 according to the secondmodification example is used to produce the lens array 680 or the likeas follows. Similarly to the first modification example mentioned above,the substrate 644 is placed on the surface of the rotating platform 410.For example, the substrate 644 includes a glass substrate made of anoptically transparent material. The stamper 640 is placed on thesubstrate 644. The stamper 640 is produced by using an opticallytransparent material and is capable of transmitting the light. The lightcuring resin is supplied to the upward surface of the stamper 640. Thesecond stamper 626 is pressed against the supplied light curing resinfrom above. The second stamper 626 is made of Ni, for example, so as tobe lightproof and preferably capable of reflecting the light.

FIG. 30 shows the process of hardening the light curing resin radiatedby light from the light irradiation unit 416 and producing the lensarray 680 in the lens array production apparatus 400 according to thesecond modification example.

According to the second modification example, the radiation emitter 418radiates light as shown in FIG. 30. The light radiated from theradiation emitter 418 passes through the substrate 644, then the stamper640, and reaches the light curing resin. The light passing through thelight curing resin reflects on the second stamper 626 and re-reaches theinside of the light curing resin. As a result, the light curing resinhardens.

As mentioned above, the first optical part production system 5 uses themolding apparatus 10 to produce masters such as the master 600. Thesecond optical part production system 5 uses the molding apparatus 10 toproduce the stamper 640. The molding apparatus 10 can be used to producenot only masters and stampers but also a wide range of molded articles.For example, the molding apparatus 10 can be used to mold lens arrays asoptical parts.

In the first optical part production system 5, the transfer steptransfers the transfer shape of the transfer member 62 to a mastermaterial. The transfer step is repeated more than once so that thetransfer member 62 successively contacts different positions on themaster material. In the second optical part production system 5, thetransfer step transfers the transfer shape of the transfer member 62 toa stamper material. The transfer step is repeated more than once so thatthe transfer member 62 successively contacts different positions on themaster material. Likewise, the molding apparatus 10 is used to producethe lens array as follows. The transfer step transfers the transfershape of the transfer member 62 to a lens array material such as lightcuring resin or heat curing resin. The transfer step is repeated morethan once so that the transfer member 62 successively contacts differentpositions on the lens array material.

That is, the molding apparatus 10 produces the lens array by repeatingthe transfer step more than once. The transfer step includes the stepsof: contacting the transfer member 62 formed into the transfer shapewith the lens array material used as an article to be molded andtransforming the lens array material to the transfer member shape;hardening at least the transformed portion of the lens array material;separating the transfer member 62 from the lens array material; andmoving the transfer member 62 to another position on the lens arraymaterial.

FIG. 31 shows an enlarged view around the transfer member 62 of themolding apparatus 10 during production of the lens array.

When the lens array is produced as shown in FIG. 31, it may bepreferable to form a scribe layer (cutting portion) S inside thesubstrate W1 between adjacent holes h in the substrate W1, for example.The position of the substrate W1 for forming the scribe layer Sindicates a lower strength than the other portions. The substrate W1 isdivided at the scribe layer S.

FIGS. 32A to 32C show the process of producing lenses as optical partshaving at least one lens portion by using a lens array 1304 produced bythe molding apparatus 10 through the above-mentioned steps.

As shown in FIGS. 32A and 32B, multiple lens arrays, after being formed,are cemented as needed such as by bonding, for example (cementing step).FIG. 32A shows three lens arrays 1304 before cementing. FIG. 32B shows acemented lens array 1310 of the three cemented lens arrays 1304.

The cemented lens array 1310 cemented at the cementing step is dividedsuch as by cutting so as to ensure at least one lens portion (dividingstep). The cemented lens array 1310 is divided to produce lenses. Asmentioned above, forming the scribe layer S (see FIG. 31) in the wafer Wfacilitates division of the cemented lens array 1310.

FIG. 32C shows a lens 1314 produced by cutting the cemented lens array1310 so as to include one lens portion 1312. The cemented lens array1310 includes the lens arrays 1304 that are cemented so as to belayered. For example, the lens 1314 may be attached to a light receivingelement such as a CMOS sensor, making it possible to produce a camera.The produced camera may be built in a mobile telephone, for example.

In the above-mentioned lens manufacturing process, multiple lens arrays1304 are cemented to form a cemented lens array. The cemented lens array1310 is divided to produce the lenses 1314 having multiple lensportions. The lens arrays 1304 may be independently divided withoutbeing cemented to form single-layer lenses 1314. The lens array 1304 andthe cemented lens array 1310 may be used as they are without beingdivided.

The molding apparatus 10 can be used to produce not only masters,stampers, and optical parts such as lens arrays but also electroformedmolds and electroforming baths used for electroforming.

INDUSTRIAL APPLICABILITY

As mentioned above, for example, the present invention can be applied tolenses such as a lens array having an aspherical lens portion, methodsof molding molded articles such as molds used for the lenses, andmolding apparatuses. Further, the invention can be applied to methods ofproducing lenses that are used for cameras including light receivingelements such as CMOS sensors and are provided with aspherical lensportions. Moreover, the invention can be applied to methods of producingassociated stampers, master production apparatuses, stamper productionsystems, and stamper production apparatuses.

1. A method of molding comprising: a transformation step of makingcontact between an article to be molded and a transfer member andtransforming the article to be molded to a transfer shape formed on thetransfer member, the transfer shape being formed equally to or reverselyto an aspherical lens portion; a hardening step of hardening at least atransformed portion of the article to be molded; a separation step ofseparating the article to be molded and the transfer member from eachother; and a moving step of moving the transfer member to anotherposition of the article to be molded, wherein a transfer step oftransferring the transfer shape to an article to be molded is repeatedmore than once.
 2. The method of molding according to claim 1, whereinthe transformation step includes: an injection step of injecting thearticle to be molded into a plurality of holes formed in a substrate;and a contact step of contacting the transfer member with the article tobe molded injected into the hole.
 3. The method of molding according toclaim 1, wherein the injection step and the contact step are alternatelyrepeated more than once.
 4. The method of molding according to claim 1,wherein a pitch distance between positions for the transfer member tocontact the article to be molded is changed or the shape of the transfermember is changed in accordance with shrinkage of the article to bemolded.
 5. The method of molding according to claim 1, wherein thetransformation step transforms the article to be molded using thetransfer member that only forms one aspherical lens shape or a shapeformed reversely to the aspherical lens shape.
 6. The method of moldingaccording to claim 1, wherein an article to be molded made of a lightcuring material is used; and wherein the hardening step hardens thearticle to be molded by radiating light.
 7. The method of moldingaccording to claim 1, wherein an article to be molded made of a heatcuring material is used; and wherein the hardening step hardens thearticle to be molded by heating.
 8. The method of molding according toclaim 1, wherein an aspherical lens is molded.
 9. The method of moldingaccording to claim 1, wherein a mold used for forming an aspherical lensis molded.
 10. A process for producing a lens comprising: a molding stepof molding a mold having a plurality of shapes formed reversely to thetransfer shape by repeating a transfer step more than once, wherein thetransfer step includes: a transformation step of making contact betweenan article to be molded and a transfer member having a transfer shapeformed equally to an aspherical lens portion and transforming thearticle to be molded to the transfer shape; a hardening step ofhardening at least a transformed portion of the article to be molded; aseparation step of separating the article to be molded and the transfermember from each other; and a moving step of moving the transfer memberto another position of the article to be molded; a lens array formationstep of forming a lens array having a plurality of aspherical lensportions using a mold molded by the molding step; and a dividing step ofdividing the lens array formed by the lens array formation step into aplurality of lenses having at least one aspherical lens portion.
 11. Amolding apparatus comprising: a supporting portion that supports anarticle to be molded; a transfer member that is contactably provided forthe article to be molded supported by the supporting portion andincludes a transfer shape formed equally to or reversely to anaspherical lens portion; a moving apparatus that moves at least one ofthe supporting portion and the transfer member so as to separate thetransfer member from the article to be molded supported by thesupporting portion and relatively move and contact the transfer memberwith another position of the article to be molded; a hardening apparatusthat contacts at least the transfer member of the article to be moldedand hardens a portion transformed to the transfer shape; and a controlportion that controls at least the moving apparatus and the hardeningapparatus so that the transfer shape is transferred more than once tothe article to be molded. 12-25. (canceled)